| 專利名稱(中) | 低成本精密位移計 |
| 專利名稱(英) | LOW-COST COMPACT MICRO-DISPLACEMENT SENSOR |
| 專利家族 |
中華民國:I874483 |
| 專利權人 | 國立清華大學 100.00% |
| 發明人 | 曹哲之,曾宜鈞 |
| 技術領域 | 電子電機,機械結構 |
| 本發明係關於一種低成本、體積小、結構簡單、可以精密量測小至次微米等級的微小位移的位移感測裝置與技術。其基本概念係將欲量測之微小位移透過一個機械式位移放大器放大10到100 倍至微米以上精密等級後,再以較低成本的位移感測器讀取放大後的數值而得到實際位移之量測。 |
| This invention describes a small sized precision displacement sensor at sub-micron accuracy level with a cost of a fraction of those of existing commercial devices. The basic concept of the new sensor system is to apply a mechanical mechanism to magnify a sub-micron displacement to be measured by about 10 to 100 times so that the magnified displacement becomes within the measurement range of a low cost sensor such as a Hall sensor. |
| 承辦人姓名 | 楊慧敏 |
| 承辦人電話 | (03)571-5131 #31181 |
| 承辦人Email | hmyang@mx.nthu.edu.tw |