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專利授權區

專利授權區
專利名稱(英)	Wafer notch automated aligner
專利家族	中華民國：I799990 大陸：CN 115810571 A(公開號) 美國：US 12,217,993
專利權人	國立清華大學 100.00%
發明人	葉維彰,譚詩毅
技術領域	電子電機,工業工程

專利摘要(英)
Provided is a wafer notch automated aligner, including a main body, a wafer rotation mechanism, and a wafer positioning mechanism. The main body has a wafer boat placement portion. The wafer rotation mechanism is disposed on the main body and includes a rotor, the rotor extends through the wafer boat placement portion, and an angle between an axis of the rotor and the main body is between 0° and 90°. The wafer positioning mechanism is disposed on the main body and includes a positioning member, the positioning member extends through the wafer boat placement portion, and an axis of the positioning member is parallel to the axis of the rotor. Hence, a plurality of wafers is disposed in a stepped arrangement by the inclined rotor and the inclined positioning member, and the wafer notch automated aligner can rotate wafers, align notches, and identify wafer identifications.

專利摘要(英)

Provided is a wafer notch automated aligner, including a main body, a wafer rotation mechanism, and a wafer positioning mechanism. The main body has a wafer boat placement portion. The wafer rotation mechanism is disposed on the main body and includes a rotor, the rotor extends through the wafer boat placement portion, and an angle between an axis of the rotor and the main body is between 0° and 90°. The wafer positioning mechanism is disposed on the main body and includes a positioning member, the positioning member extends through the wafer boat placement portion, and an axis of the positioning member is parallel to the axis of the rotor. Hence, a plurality of wafers is disposed in a stepped arrangement by the inclined rotor and the inclined positioning member, and the wafer notch automated aligner can rotate wafers, align notches, and identify wafer identifications.

聯絡資訊
承辦人姓名	李佳玲
承辦人電話	03-5715131 #62300
承辦人Email	cl.lee@mx.nthu.edu.tw