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專利授權區
專利名稱(中)	石墨烯薄膜製造方法
專利名稱(英)	MANUFACTURING METHOD OF GRAPHENE FILM
專利家族	中華民國：I592509
專利權人	國立清華大學 100%
發明人	顏文群,闕郁倫
技術領域	材料化工,電子電機

專利摘要(中)
一種石墨烯薄膜製造方法包括以下步驟：將一基板設置於一反應腔體，反應腔體具有一入口及一出口；提供一金屬催化物於反應腔體中；通入一還原性氣體至反應腔體中；升溫反應腔體至一沉積溫度；通入一含碳氣體於反應腔體中；以及金屬催化物協助含碳氣體產生複數個碳原子，以沉積於基板以形成一石墨烯薄膜。本發明之石墨烯薄膜製造方法可於基板上沉積石墨烯薄膜，且具有於後端應用中無需再經過轉移程序之優勢。 A manufacturing method of graphene film includes the following steps: disposing a substrate in a reaction chamber, and the reaction chamber includes an inlet and an outlet; providing a metallic catalytic material in the reaction chamber; aerating a reducing gas into the reaction chamber; rising temperature of reaction chamber to a deposition temperature; aerating a carbon-containing gas into the reaction chamber; and generating a plurality of carbon atom from the carbon-containing gas under the assistance of the metallic catalytic material to deposit on the substrate to form a graphene film.The manufacturing method of graphene film is capable of depositing graphene film on the substrate.　 Preferably, the manufacturing method of the present invention is advantageous for being a transfer-free Process.

專利摘要(中)

一種石墨烯薄膜製造方法包括以下步驟：將一基板設置於一反應腔體，反應腔體具有一入口及一出口；提供一金屬催化物於反應腔體中；通入一還原性氣體至反應腔體中；升溫反應腔體至一沉積溫度；通入一含碳氣體於反應腔體中；以及金屬催化物協助含碳氣體產生複數個碳原子，以沉積於基板以形成一石墨烯薄膜。本發明之石墨烯薄膜製造方法可於基板上沉積石墨烯薄膜，且具有於後端應用中無需再經過轉移程序之優勢。 A manufacturing method of graphene film includes the following steps: disposing a substrate in a reaction chamber, and the reaction chamber includes an inlet and an outlet; providing a metallic catalytic material in the reaction chamber; aerating a reducing gas into the reaction chamber; rising temperature of reaction chamber to a deposition temperature; aerating a carbon-containing gas into the reaction chamber; and generating a plurality of carbon atom from the carbon-containing gas under the assistance of the metallic catalytic material to deposit on the substrate to form a graphene film.The manufacturing method of graphene film is capable of depositing graphene film on the substrate.　 Preferably, the manufacturing method of the present invention is advantageous for being a transfer-free Process.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw