專利授權區國立清華大學國際產學營運總中心 Operations Center for Industry Collaboration

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專利授權區

專利授權區
專利名稱(中)	即時檢測全場厚度的光學裝置
專利名稱(英)	OPTICAL INTERFEROMETRIC SYSTEM FOR MEASUREMENT OF A FULL-FIELD THICKNESS OF A PLATE-LIKE OBJECT IN REAL TIME
專利家族	中華民國：I601938 大陸：3706038 美國：9,952,034
專利權人	國立清華大學 100.00%
發明人	宋泊錡,王偉中
技術領域	機械結構,光電光學

專利摘要(中)
This invention provides an optical interferometric apparatus for real-time full-field thickness inspection, which includes two light source units, two screens, two image acquisition devices, and an image processing module. The light source units can generate a first incident light and a second incident light which traveling to a reference point of a plane object. The first incident light and the second incident light are of high-coherence point-expanded spherical-wavefront light beam and generate a first interference fringe pattern and a second interference fringe pattern, respectively. The first interference fringe pattern and the second interference fringe pattern are imaged to the screens, respectively. The image acquisition devices are set on the screens to capture the first interference fringe pattern and the second interference fringe pattern, respectively. The image processing module is connected with the image acquisition to obtain a digital signal and to calculate a full-field thickness of the plane object.

專利摘要(中)

This invention provides an optical interferometric apparatus for real-time full-field thickness inspection, which includes two light source units, two screens, two image acquisition devices, and an image processing module. The light source units can generate a first incident light and a second incident light which traveling to a reference point of a plane object. The first incident light and the second incident light are of high-coherence point-expanded spherical-wavefront light beam and generate a first interference fringe pattern and a second interference fringe pattern, respectively. The first interference fringe pattern and the second interference fringe pattern are imaged to the screens, respectively. The image acquisition devices are set on the screens to capture the first interference fringe pattern and the second interference fringe pattern, respectively. The image processing module is connected with the image acquisition to obtain a digital signal and to calculate a full-field thickness of the plane object.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw