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專利授權區

專利授權區
專利名稱(中)	半導體批次生產派工方法
專利名稱(英)	METHOD OF DISPATCHING SEMICONDUCTOR BATCH PRODUCTION
專利家族	中華民國：I523129 美國：9,513,626
專利權人	國立清華大學 100.00%
發明人	許嘉裕,陳暎仁,簡禎富
技術領域	工業工程,電子電機

專利摘要(中)
Disclosure is a method of dispatching semiconductor batch production, including: measuring an actual line width to calculate an estimated value of line width bias reference level, an estimated value of product bias, an estimated value of chamber bias and a standard error of chamber bias, and storing in a historical data module; inputting a product category, a line width measurement before manufacturing and a target line width after manufacturing in a batch production module; calculating a similarity index of each chambers by a computing engine of a matching module according to the data stored in the historical data module; transforming the similarity index into a priority of machine allocation by a dispatching module and dispatching a production machine; updating the historical data module by measuring a line width after manufacturing. The line width bias generated by various variations will be eliminated during the manufacturing process.

專利摘要(中)

Disclosure is a method of dispatching semiconductor batch production, including: measuring an actual line width to calculate an estimated value of line width bias reference level, an estimated value of product bias, an estimated value of chamber bias and a standard error of chamber bias, and storing in a historical data module; inputting a product category, a line width measurement before manufacturing and a target line width after manufacturing in a batch production module; calculating a similarity index of each chambers by a computing engine of a matching module according to the data stored in the historical data module; transforming the similarity index into a priority of machine allocation by a dispatching module and dispatching a production machine; updating the historical data module by measuring a line width after manufacturing. The line width bias generated by various variations will be eliminated during the manufacturing process.

聯絡資訊
承辦人姓名	李佳玲
承辦人電話	03-5715131 #62300
承辦人Email	cl.lee@mx.nthu.edu.tw