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專利授權區
專利名稱(中)	感測系統單晶片及其製作方法
專利名稱(英)	SENSING SYSTEM ON CHIP AND METHOD TO PRODUCE THEREFORE
專利家族	中華民國：I 841049 美國：US 2024/0162098 A1(公開號)
專利權人	國立清華大學 100% ,國立清華大學 100%
發明人	錢東林,李雅筑,方維倫
技術領域	機械結構,電子電機

專利摘要(英)
A sensing system on chip (SoC) is disclosed. The sensing SoC includes a substrate constructed on a CMOS platform; a thermometer formed on the substrate; a humidity sensing unit formed on the substrate and having a first heating unit; an air pressure sensing unit formed on the substrate; and a gas sensing unit formed on the substrate and having a second heating unit, wherein the humidity sensing unit, the air pressure sensing unit, and the gas sensing unit are laterally distributed on the substrate.

專利摘要(英)

A sensing system on chip (SoC) is disclosed. The sensing SoC includes a substrate constructed on a CMOS platform; a thermometer formed on the substrate; a humidity sensing unit formed on the substrate and having a first heating unit; an air pressure sensing unit formed on the substrate; and a gas sensing unit formed on the substrate and having a second heating unit, wherein the humidity sensing unit, the air pressure sensing unit, and the gas sensing unit are laterally distributed on the substrate.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw