專利授權區國立清華大學國際產學營運總中心 Operations Center for Industry Collaboration

搜尋專利授權區

關鍵字

» 新增關鍵字

選單

專利授權區

專利授權區
專利名稱(中)	氣溶膠沉積設備
專利名稱(英)	AEROSOL DEPOSITION EQUIPMENT
專利家族	中華民國：I834553
專利權人	國立清華大學 100.00%
發明人	曾繁根,彭顯智
技術領域	光電光學,生化醫藥

專利摘要(中)
一種氣溶膠沉積設備，包含腔體、電漿裝置及噴霧裝置。該腔體界定出處理空間且包括設置於該處理空間並具有承載面的載台。該噴霧裝置用以產生氣溶膠且將氣溶膠送入該處理空間，且包括注射單元、霧化單元及閥單元。該閥單元與該腔體連接並用以控制氣溶膠進入該處理空間，且界定出用以供氣溶膠通過的直線通道及具有連接於該腔體的接觸面。該承載面的寬度除以該承載面與該接觸面間的距離的數值為大於0.05且小於3，該承載面的法線方向與該接觸面間的夾角為45度至135度，該直線通道的長度除以該直線通道的最小等效直徑的數值為大於0.125且小於15。

專利摘要(中)

一種氣溶膠沉積設備，包含腔體、電漿裝置及噴霧裝置。該腔體界定出處理空間且包括設置於該處理空間並具有承載面的載台。該噴霧裝置用以產生氣溶膠且將氣溶膠送入該處理空間，且包括注射單元、霧化單元及閥單元。該閥單元與該腔體連接並用以控制氣溶膠進入該處理空間，且界定出用以供氣溶膠通過的直線通道及具有連接於該腔體的接觸面。該承載面的寬度除以該承載面與該接觸面間的距離的數值為大於0.05且小於3，該承載面的法線方向與該接觸面間的夾角為45度至135度，該直線通道的長度除以該直線通道的最小等效直徑的數值為大於0.125且小於15。

專利摘要(英)
This invention provides an aerosol deposition equipment, which comprises a chamber, a plasma device and a spray device. Said chamber defines a processing space and includes a carrier which is set in said processing space and has a carrying surface. Said spray device is used to generate aerosol and send said aerosol into said processing space, and includes an injection unit, an atomization unit and a valve unit. Said valve unit is connected with said chamber, and is used to control said aerosol to enter said processing space. Said valve unit defines a straight channel for said aerosol to pass through and has a contact surface which connected to said chamber. A value of a width of said carrying surface divided by a distance between said carrying surface and said contact surface is greater than 0.05 and less than 3. An angle between a normal direction of said carrying surface and said contact surface is 45 degrees to 135 degrees. A value of a length of said straight channel divided by a minimum equivalent diameter of said straight channel is greater than 0.125 and less than 15.

專利摘要(英)

This invention provides an aerosol deposition equipment, which comprises a chamber, a plasma device and a spray device. Said chamber defines a processing space and includes a carrier which is set in said processing space and has a carrying surface. Said spray device is used to generate aerosol and send said aerosol into said processing space, and includes an injection unit, an atomization unit and a valve unit. Said valve unit is connected with said chamber, and is used to control said aerosol to enter said processing space. Said valve unit defines a straight channel for said aerosol to pass through and has a contact surface which connected to said chamber. A value of a width of said carrying surface divided by a distance between said carrying surface and said contact surface is greater than 0.05 and less than 3. An angle between a normal direction of said carrying surface and said contact surface is 45 degrees to 135 degrees. A value of a length of said straight channel divided by a minimum equivalent diameter of said straight channel is greater than 0.125 and less than 15.

聯絡資訊
承辦人姓名	楊慧敏
承辦人電話	(03)571-5131 #31181
承辦人Email	hmyang@mx.nthu.edu.tw