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專利授權區
專利名稱(中) 使用陰影雲紋法線上即時檢測表面形貌與平面外變形之方法與系統
專利名稱(英) METHOD AND SYSTEM FOR ON-LINE REAL-TIME MEASURING THE SURFACE TOPOGRAPHY AND OUT-OF-PLANE DEFORMATION BY USING PHASE-SHIFTING SHADOW MOIRE METHOD
專利家族 中華民國:I471522
美國:10,006,761
專利權人 國立清華大學 100.00%
發明人 康文譯,許軒豪,張雅欣,王偉中
技術領域 機械結構,光電光學
專利摘要(中)
The present invention is directed to a system and method for on-line real-time measuring the surface topography and out-of-plane deformation by using phase-shifting shadow moiré method. Digital Phase-Shifting Shadow Moiré Method is applied to a system, which receives the reflected images from the surface of transparent or non-transparent plate projected under a light beam passing through a grating. Next, by image correction program, the skewed interference fringe pattern is recovered to the image as if the image acquisition equipment is placed normal to the surface. Furthermore, the received images are processed with Phase-Shifting to show the surface topography of the plate.
聯絡資訊
承辦人姓名 劉千綺
承辦人電話 03-571-5131 #31181
承辦人Email chienchi@mx.nthu.edu.tw
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