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專利授權區

專利授權區
專利名稱(中)	微機電電容式麥克風
專利家族	中華民國：I448164 大陸：1328653 德國：10 2011 050 040 日本：5309353 美國：8,436,435
專利權人	國立清華大學 100%
發明人	詹竣凱,方維倫
技術領域	機械結構,電子電機

專利摘要(中)
PROBLEM TO BE SOLVED: To provide a micro-electro-machine capacitor microphone. SOLUTION: A micro-electro-machine capacitor microphone (20, 30) solves a stress residual problem and improves a microphone sensitivity. The microphone includes a support (27) and a vibrating film (22). The support (27) supports a central portion of the vibrating film (22), thereby excluding and discharging a stress that the vibrating film (22) generates during a thermal process, maintaining the vibrating film (22) flat, and improving a precision of electrostatic capacitance detection. Furthermore, the microphone may include a rigid vibrating film (32) and an elastic component (33), and the rigid vibrating film (32) is installed on the elastic component (33), so that the rigid vibrating film (32) is moved parallel in the direction of a back electrode (34) by elastic operation of the elastic component (33), an electrostatic capacitance change between the rigid vibrating film (32) and the back electrode (34) is acquired, and a relatively high detection sensitivity is provided. COPYRIGHT: (C)2012,JPO＆INPIT

專利摘要(中)

PROBLEM TO BE SOLVED: To provide a micro-electro-machine capacitor microphone. SOLUTION: A micro-electro-machine capacitor microphone (20, 30) solves a stress residual problem and improves a microphone sensitivity. The microphone includes a support (27) and a vibrating film (22). The support (27) supports a central portion of the vibrating film (22), thereby excluding and discharging a stress that the vibrating film (22) generates during a thermal process, maintaining the vibrating film (22) flat, and improving a precision of electrostatic capacitance detection. Furthermore, the microphone may include a rigid vibrating film (32) and an elastic component (33), and the rigid vibrating film (32) is installed on the elastic component (33), so that the rigid vibrating film (32) is moved parallel in the direction of a back electrode (34) by elastic operation of the elastic component (33), an electrostatic capacitance change between the rigid vibrating film (32) and the back electrode (34) is acquired, and a relatively high detection sensitivity is provided. COPYRIGHT: (C)2012,JPO＆INPIT

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw