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專利授權區
專利名稱(中) 過渡金屬硫族化物二維薄膜的製備方法
專利名稱(英) MANUFACTURING METHOD OF TWO-DIMENSIONAL TRANSITION-METAL CHALCOGENIDE THIN FILM
專利家族 中華民國:I579398
美國:9,460,919
專利權人 國立清華大學 100.00%
發明人 謝宜真,陳雨澤,麥迪納,闕郁倫
技術領域 材料化工,能源科技,電子電機
專利摘要(中)
A manufacturing method of a two-dimensional transition-metal chalcogenide thin film includes providing a substrate, providing a reaction film, providing a source and providing a microwave. The substrate is made of material having dipole moments. The reaction film, disposed on the substrate, has a predefined thickness and includes a transition-metal compound. The source includes S, Se, or Te. The substrate is heated by the microwave to produce a heat energy to the reaction film and the source; thus a chemical reaction takes place and the two-dimensional transition-metal chalcogenide thin film is formed on the substrate. The two-dimensional transition-metal thin film includes a plurality of elements, and each of the elements aligns along a predefined direction by controlling a value of the predefined thickness.
聯絡資訊
承辦人姓名 楊美茹
承辦人電話 03-5715131 #62305
承辦人Email mjyang2@mx.nthu.edu.tw
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