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專利授權區
專利名稱(中)	製備金屬硫屬化物垂直異質接面的方法
專利名稱(英)	METHOD FOR FABRICATING A VERTICAL HETEROJUNCTION OF METAL CHALCOGENIDES
專利家族	中華民國：I627301 美國：9,899,214
專利權人	國立清華大學 100%
發明人	溫偉源,蔡勖升,梁正宏
技術領域	材料化工

專利摘要(中)
The present disclosure provides a method for fabricating a vertical heterojunction of metal chalcogenides. The method includes steps of providing a multi-layer material, performing an ion implantation and performing an annealing. The multi-layer material has a carrier and a metal layer, in which the metal layer covers the carrier to form an interface. The carrier includes an oxide of a first metal element, and the metal layer includes a second metal element. The step of performing the ion implantation is to inject a chalcogen ion source into the multi-layer material to allow a plurality of chalcogen ions to be implanted in a depth area of the multi-layer material, and the depth area includes the interface. The step of performing the annealing is to form a first metal chalcogenide and a second metal chalcogenide at two sides of the interface, respectively.

專利摘要(中)

The present disclosure provides a method for fabricating a vertical heterojunction of metal chalcogenides. The method includes steps of providing a multi-layer material, performing an ion implantation and performing an annealing. The multi-layer material has a carrier and a metal layer, in which the metal layer covers the carrier to form an interface. The carrier includes an oxide of a first metal element, and the metal layer includes a second metal element. The step of performing the ion implantation is to inject a chalcogen ion source into the multi-layer material to allow a plurality of chalcogen ions to be implanted in a depth area of the multi-layer material, and the depth area includes the interface. The step of performing the annealing is to form a first metal chalcogenide and a second metal chalcogenide at two sides of the interface, respectively.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw