An electrode for a two-dimensional semiconductor device includes a contact electrode and a metal electrode formed thereon, wherein the material of the contact electrode is a semi-metal alloy, and the semi-metal alloy is composed of several semi-metal elements or composed of at least one semi-metal element and alloy material thereof. A two-dimensional semiconductor device includes a substrate, a two-dimensional semiconductor material layer, and a plurality of electrodes. The two-dimensional semiconductor material layer is formed on the substrate, and the electrodes are formed on the two-dimensional semiconductor material layer, wherein the electrodes include the contact electrode and the metal electrode, and the contact electrode is between the metal electrode and the two-dimensional semiconductor material layer. Accordingly, the semi-metal alloy causes a gap slightly smaller than the Van der Waals distance formed between the metal electrode and two-dimensional semiconductor material respectively, and thus the stability of the structure can be kept, and the coupling of outer orbital electrons between the metal electrode and two-dimensional semiconductor material can be reduced. |