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專利授權區


專利授權區
專利名稱(中) 極紫外光光譜橢偏儀
專利名稱(英) EUV SPECTROSCOPIC POLARIMETER
專利家族 中華民國:I780700
美國:11,313,727
專利權人 國立清華大學 100%
發明人 陳明彰,張光佑,黃旆齊
技術領域 材料化工,能源科技,光電光學,電子電機
專利摘要(英)
An EUV spectroscopic polarimeter including a light receiving element, a first polarizing modulation element, a second polarizing modulation element, an energy splitting element and a light detecting and analyzing apparatus. The light receiving element is for receiving a target light. The first polarizing modulation element is rotatably connected to the light receiving element for generating a first polarized light. The second polarizing modulation element is rotatably connected to the first polarizing modulation element for generating a second polarized light. The energy splitting element receives the second polarized light so as to generate a modulated-polarization and energy-resolved light. The light detecting and analyzing apparatus receiving the polarization-modulated and energy-resolved light and retrieving the polarization information for the whole spectrum of the target light by an analyzing algorithm.
聯絡資訊
承辦人姓名 李曉琪
承辦人電話 03-5715131 #31061
承辦人Email hsiaochi@mx.nthu.edu.tw
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