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專利授權區


專利授權區
專利名稱(中) 微型探測器及缺陷量測方法
專利名稱(英) MICRO DETECTOR
專利家族 中華民國:I723371
大陸:CN111785650A(公開號)
美國:11,335,609
專利權人 國立清華大學 100%
發明人 蔡宜霈,林本堅,金雅琴,林崇榮
技術領域 光電光學,電子電機
專利摘要(中)
A micro detector includes a substrate, a fin structure, a floating gate, a sensing gate, a reading gate and an antenna layer. The fin structure is located on the substrate. The floating gate is located on the substrate, and the floating gate is vertically and crossly arranged with the fin structure. The sensing gate is located at one side of the fin structure. The reading gate is located at the other side of the fin structure. The antenna layer is located on the sensing gate and is connected with the sensing gate. An induced charge is generated when the antenna layer is contacted with an external energy source, and the induced charge is stored in the floating gate.
聯絡資訊
承辦人姓名 李曉琪
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