Disclosure is a multi-objective semiconductor product capacity planning system and method thereof. The system comprises a data input module, a capacity planning module and a computing module. The machine information of the production stations, the product information and the order information are input by the data input module. According to the demand quantity of order, capacity information and product information, the capacity planning module plans a capacity allocation to determine the satisfied quantity of orders. The capacity allocation information is used to form a gene combination by chromosome encoding method. The computing module calculates the gene combination several times to generate numerous candidate solutions by a multi-objective genetic algorithm. The numerous candidate solutions sorts out and generates a new gene combination, and repeats the calculation to form candidate solution set until stop condition is satisfied. The candidate solution set is transformed into numerous suggestive plans as options. |