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專利授權區
專利名稱(中)	轉移薄膜的方法
專利名稱(英)	METHOD OF TRANSFERRING THIN FILM
專利家族	中華民國：I606599 美國：10,115,848
專利權人	國立清華大學 100.00%
發明人	曾冠鈞,顏鈺庭,闕郁倫
技術領域	材料化工,能源科技,光電光學

專利摘要(中)
A method of transferring a thin film includes: providing a first element structure, wherein the first element structure includes a first substrate and a functional film layer formed on the first substrate; completely removing the first substrate, wherein steps of the completely removing the first substrate includes: conducting an etching step to erode the first substrate, and conducting a grinding step to planarize the eroded first substrate; and after completely removing the first substrate, attaching the functional film layer on a second substrate to form a second element structure.

專利摘要(中)

A method of transferring a thin film includes: providing a first element structure, wherein the first element structure includes a first substrate and a functional film layer formed on the first substrate; completely removing the first substrate, wherein steps of the completely removing the first substrate includes: conducting an etching step to erode the first substrate, and conducting a grinding step to planarize the eroded first substrate; and after completely removing the first substrate, attaching the functional film layer on a second substrate to form a second element structure.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw