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專利授權區
專利名稱(中)	使用半導體偵測器的偵測方法與半導體結構
專利名稱(英)	DETECTION USING SEMICONDUCTOR DETECTOR AND SEMICONDUCTOR STRUCTURE
專利家族	中華民國：I782474 大陸：CN113539873A(公開號) 美國：2021-0407764(公開號)
專利權人	國立清華大學 66.67% ,台灣積體電路製造股份有限公司 33.33%
發明人	金雅琴,林崇榮,林本堅,王建評,王紹華,張俊霖,陳立銳
技術領域	電子電機

專利摘要(英)
A detection method using semiconductor detector includes applying a first voltage to a source of a first transistor of a detector unit of a semiconductor detector in a test wafer and applying a second voltage to a gate of the first transistor and a drain of a second transistor of the detector unit. The first transistor is coupled to the second transistor in series, and the first voltage is higher than the second voltage. A pre-exposure reading operation is performed to the detector unit. Light of an exposure apparatus is illuminated to a gate of the second transistor after applying the first and second voltages. A post-exposure reading operation is performed to the detector unit. Data of the pre-exposure reading operation is compared with the post-exposure reading operation. An intensity of the light is adjusted based on the compared data of the pre-exposure reading operation and the post-exposure reading operation.

專利摘要(英)

A detection method using semiconductor detector includes applying a first voltage to a source of a first transistor of a detector unit of a semiconductor detector in a test wafer and applying a second voltage to a gate of the first transistor and a drain of a second transistor of the detector unit. The first transistor is coupled to the second transistor in series, and the first voltage is higher than the second voltage. A pre-exposure reading operation is performed to the detector unit. Light of an exposure apparatus is illuminated to a gate of the second transistor after applying the first and second voltages. A post-exposure reading operation is performed to the detector unit. Data of the pre-exposure reading operation is compared with the post-exposure reading operation. An intensity of the light is adjusted based on the compared data of the pre-exposure reading operation and the post-exposure reading operation.

聯絡資訊
承辦人姓名	李曉琪
承辦人電話	03-5715131 #31061
承辦人Email	hsiaochi@mx.nthu.edu.tw