搜尋專利授權區
關鍵字
選單
專利授權區


專利授權區
專利名稱(中) 自動啟閉辨識功能的晶圓刻號辨識裝置
專利名稱(英) DEVICE FOR RECOGNIZING WAFER IDENTIFICATION NUMBER WITH AUTOMATICALLY TURNING ON AND OFF RECOGNIZING FUNCTION
專利家族 大陸:CN 116668840 A(公開號)
美國:US 12,068,182B2
專利權人 國立清華大學 100%
發明人 葉維彰,譚詩毅,林元慈
技術領域 資訊工程,電子電機
專利摘要(英)
A device for recognizing wafer identification number with automatically turning on and off recognizing function comprises a base, a support frame, a light source, a plurality of image capturing units, an image recognition unit and a control unit. The base comprises a wafer boat placing portion and a first switch disposed on the wafer boat placing portion. The light source and the image capturing units are disposed on the support frame. The control unit is electrically connected to the first switch, the light source, the image capturing units and the image recognition unit. As such, the device for recognizing wafer identification number with automatically turning on and off recognizing function can automatically turn on and off the light source, the image capturing units, and the image recognition unit, therefore the operation is very easy and convenience.
聯絡資訊
承辦人姓名 李佳玲
承辦人電話 03-5715131 #62300
承辦人Email cl.lee@mx.nthu.edu.tw
我有興趣 BACK