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專利授權區
專利名稱(中)	厚度線上即時檢測之光學干涉裝置及其方法
專利名稱(英)	Optical Interferometric Apparatus for Real-Time Full-Field Thickness Inspection and Method Thereof
專利家族	中華民國：I486550 大陸：2796773 美國：9,644,947
專利權人	國立清華大學 100.00%
發明人	宋泊錡,李孟修,黃吉宏,王偉中
技術領域	機械結構,光電光學

專利摘要(中)
A device for real-time thickness inspection is provided. An optical interferometric technique is used. Measurement requirements in rapid online thickness inspection can be satisfied. An object is measured in a non-contact and non-destructive way. For measuring, an optical spherical wavefront is radiated on the object in an oblique angle. The interference fringe pattern (IFP) thus imaged on a screen is directly related to the thickness distribution of the object. The phase difference on the same horizontal cross section in the IFP monotonically decreases from the light source side to the other side. Accordingly, phase unwrapping can be effectively performed without using phase shift. The present invention achieves rapid on-line thickness inspection through the optical path of interference without using optical lens groups and special optical elements. The present invention radiates a high-coherence point-expanded spherical-wavefront light beam in an oblique angle for an instantaneous and wide-area full-field thickness measurement.

專利摘要(中)

A device for real-time thickness inspection is provided. An optical interferometric technique is used. Measurement requirements in rapid online thickness inspection can be satisfied. An object is measured in a non-contact and non-destructive way. For measuring, an optical spherical wavefront is radiated on the object in an oblique angle. The interference fringe pattern (IFP) thus imaged on a screen is directly related to the thickness distribution of the object. The phase difference on the same horizontal cross section in the IFP monotonically decreases from the light source side to the other side. Accordingly, phase unwrapping can be effectively performed without using phase shift. The present invention achieves rapid on-line thickness inspection through the optical path of interference without using optical lens groups and special optical elements. The present invention radiates a high-coherence point-expanded spherical-wavefront light beam in an oblique angle for an instantaneous and wide-area full-field thickness measurement.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw